Light emitting device for display and display apparatus having the same

ABSTRACT

A light emitting device for a display including first, second, and third LED stacks each including a first semiconductor layer, an active layer, and a second semiconductor layer, first, second, and third transparent electrodes in ohmic contact with a lower surface of the first LED stack, an upper surface of the second LED stack, and an upper surface of the third LED stack, respectively, a first electrode pad disposed on the first semiconductor layer of the third LED stack, a lower second electrode pad disposed on the third transparent electrode, and first, second, and third bump pads disposed on the first LED stack and electrically connected to the LED stacks, respectively, and a common bump pad disposed electrically connected to each LED stack, in which an upper surface of the first electrode pad is located at substantially the same elevation as that of the lower second electrode pad.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority from and the benefit of U.S.Provisional Application No. 62/802,784, filed on Feb. 8, 2019, which ishereby incorporated by reference for all purposes as if fully set forthherein.

BACKGROUND Field

Exemplary embodiments relate to a light emitting device for a displayand a display apparatus, and, more particularly, to a light emittingdevice having a stack structure of a plurality of LEDs for a display,and a display apparatus including the same.

Discussion of the Background

As an inorganic light source, light emitting diodes have been used invarious technical fields, such as displays, vehicular lamps, generallighting, and the like. With various advantages of the light emittingdiodes, such as longer lifespan, lower power consumption, and fasterresponse, than existing light sources, light emitting diodes have beenreplacing the existing light sources.

Light emitting diodes have been generally used as backlight lightsources in display apparatuses. However, LED displays that directlyrealize images using the light emitting diodes have been recentlydeveloped.

In general, a display apparatus displays various colors through mixtureof blue, green, and red light. In order to realize various images, thedisplay apparatus includes a plurality of pixels, each includingsub-pixels corresponding to one of blue, green, and red light. As such,a color of a certain pixel is typically determined based on the colorsof the sub-pixels, so that images can be realized through thecombination of such pixels.

Since LEDs can emit various colors depending upon materials thereof,individual LED chips emitting blue, green and red light may be arrangedon a two-dimensional plane to provide a display apparatus. However, whenone LED chip is provided to each sub-pixel, the number of LED chips maybe increased, which may require excessive time for a mounting processduring manufacture.

Moreover, since the sub-pixels are arranged on the two-dimensional planein the display apparatus, a relatively large area is occupied by onepixel that includes the sub-pixels for blue, green, and red light. Inthis case, when an area of each sub-pixel is reduced to arrange thesub-pixels in a restricted area, luminous area of the sub-pixels may bereduced, thereby deteriorating the brightness of the pixels.

The above information disclosed in this Background section is only forunderstanding of the background of the inventive concepts, and,therefore, it may contain information that does not constitute priorart.

SUMMARY

Exemplary embodiments provide a light emitting device for a display thatis capable of increasing an area of each sub-pixel in a restricted pixelarea and a display apparatus including the same.

Exemplary embodiments also provide a light emitting device for a displaythat is capable of reducing a time associated with a mounting processand a display apparatus including the same.

Exemplary embodiments further provide a light emitting device for adisplay that is capable of increasing the production yield and a displayapparatus including the same.

Additional features of the inventive concepts will be set forth in thedescription which follows, and in part will be apparent from thedescription, or may be learned by practice of the inventive concepts.

A light emitting device for a display according to an exemplaryembodiment includes: a first LED stack; a second LED stack disposedunder the first LED stack; a third LED stack disposed under the secondLED stack; a first transparent electrode interposed between the firstLED stack and the second LED stack, and being in ohmic contact with alower surface of the first LED stack; a second transparent electrodeinterposed between the first LED stack and the second LED stack, andbeing in ohmic contact with an upper surface of the second LED stack; athird transparent electrode interposed between the second LED stack andthe third LED stack, and being in ohmic contact with an upper surface ofthe third LED stack; a first electrode pad disposed on a firstconductivity type semiconductor layer of the third LED stack; a lowersecond electrode pad disposed on the third transparent electrode; andbump pads disposed on the first LED stack, in which each of the first tothird LED stacks includes a first conductivity type semiconductor layer,an active layer, and a second conductivity type semiconductor layer, thebump pads include first, second, and third bump pads and a common bumppad, in which the common bump pad is commonly electrically connected tothe first to third LED stacks, respectively, the first to third bumppads are electrically connected to the first to third LED stacks,respectively, and an upper surface of the first electrode pad is locatedat substantially the same elevation as that of the lower secondelectrode pad.

A light emitting device for a display according to another exemplaryembodiment includes: a first LED stack; a second LED stack disposedunder the first LED stack; a third LED stack disposed under the secondLED stack; a first transparent electrode interposed between the firstLED stack and the second LED stack, and being in ohmic contact with alower surface of the first LED stack; a second transparent electrodeinterposed between the first LED stack and the second LED stack, andbeing in ohmic contact with an upper surface of the second LED stack; athird transparent electrode interposed between the second LED stack andthe third LED stack, and being in ohmic contact with an upper surface ofthe third LED stack; bump pads disposed on the first LED stack, in whicheach of the first to third LED stacks includes a first conductivity typesemiconductor layer, an active layer, and a second conductivity typesemiconductor layer, and at least one of the first to third transparentelectrodes is recessed from an edge of the second conductivity typesemiconductor layer of the first to third LED stacks.

It is to be understood that both the foregoing general description andthe following detailed description are exemplary and explanatory and areintended to provide further explanation of the invention as claimed.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a furtherunderstanding of the inventive concept, and are incorporated in andconstitute a part of this specification, illustrate exemplaryembodiments of the inventive concept, and, together with thedescription, serve to explain principles of the inventive concepts.

FIG. 1 shows schematic perspective views illustrating displayapparatuses according to exemplary embodiments.

FIG. 2 is a schematic plan view illustrating a display panel accordingto an exemplary embodiment.

FIG. 3A is a schematic plan view illustrating a light emitting deviceaccording to an exemplary embodiment.

FIG. 3B, FIGS. 3C, and 3D are schematic cross-sectional views takenalong the lines A-A′, B-B′, and C-C′ of FIG. 3A, respectively.

FIG. 4A, FIG. 4B, and FIG. 4C are schematic cross-sectional viewsillustrating first, second, and third LED stacks grown on a growthsubstrate, respectively, according to an exemplary embodiment.

FIGS. 5A, 5B, 5C, 5D, 6A, 6B, 6C, 6D, 7A, 7B, 7C, 7D, 8A, 8B, 8C, 8D,9A, 9B, 9C, 9D, 10A, 10B, 10C, 10D, 11A, 11B, 11C, 11D, 12A, 12B, 12C,12D, 13A, 13B, 13C and 13D are schematic plan views and cross-sectionalviews illustrating a method of manufacturing a light emitting device fora display according to an exemplary embodiment.

FIG. 14 is a schematic cross-sectional view illustrating a lightemitting device mounted on a circuit board according to an exemplaryembodiment.

FIG. 15A, FIG. 15B, and FIG. 15C are schematic cross-sectional viewsillustrating a method of transferring a light emitting device to acircuit board according to an exemplary embodiment.

DETAILED DESCRIPTION

In the following description, for the purposes of explanation, numerousspecific details are set forth in order to provide a thoroughunderstanding of various exemplary embodiments or implementations of theinvention. As used herein “embodiments” and “implementations” areinterchangeable words that are non-limiting examples of devices ormethods employing one or more of the inventive concepts disclosedherein. It is apparent, however, that various exemplary embodiments maybe practiced without these specific details or with one or moreequivalent arrangements. In other instances, well-known structures anddevices are shown in block diagram form in order to avoid unnecessarilyobscuring various exemplary embodiments. Further, various exemplaryembodiments may be different, but do not have to be exclusive. Forexample, specific shapes, configurations, and characteristics of anexemplary embodiment may be used or implemented in another exemplaryembodiment without departing from the inventive concepts.

Unless otherwise specified, the illustrated exemplary embodiments are tobe understood as providing exemplary features of varying detail of someways in which the inventive concepts may be implemented in practice.Therefore, unless otherwise specified, the features, components,modules, layers, films, panels, regions, and/or aspects, etc.(hereinafter individually or collectively referred to as “elements”), ofthe various embodiments may be otherwise combined, separated,interchanged, and/or rearranged without departing from the inventiveconcepts.

The use of cross-hatching and/or shading in the accompanying drawings isgenerally provided to clarify boundaries between adjacent elements. Assuch, neither the presence nor the absence of cross-hatching or shadingconveys or indicates any preference or requirement for particularmaterials, material properties, dimensions, proportions, commonalitiesbetween illustrated elements, and/or any other characteristic,attribute, property, etc., of the elements, unless specified. Further,in the accompanying drawings, the size and relative sizes of elementsmay be exaggerated for clarity and/or descriptive purposes. When anexemplary embodiment may be implemented differently, a specific processorder may be performed differently from the described order. Forexample, two consecutively described processes may be performedsubstantially at the same time or performed in an order opposite to thedescribed order. Also, like reference numerals denote like elements.

When an element, such as a layer, is referred to as being “on,”“connected to,” or “coupled to” another element or layer, it may bedirectly on, connected to, or coupled to the other element or layer orintervening elements or layers may be present. When, however, an elementor layer is referred to as being “directly on,” “directly connected to,”or “directly coupled to” another element or layer, there are nointervening elements or layers present. To this end, the term“connected” may refer to physical, electrical, and/or fluid connection,with or without intervening elements. Further, the D1-axis, the D2-axis,and the D3-axis are not limited to three axes of a rectangularcoordinate system, such as the x, y, and z-axes, and may be interpretedin a broader sense. For example, the D1-axis, the D2-axis, and theD3-axis may be perpendicular to one another, or may represent differentdirections that are not perpendicular to one another. For the purposesof this disclosure, “at least one of X, Y, and Z” and “at least oneselected from the group consisting of X, Y, and Z” may be construed as Xonly, Y only, Z only, or any combination of two or more of X, Y, and Z,such as, for instance, XYZ, XYY, YZ, and ZZ. As used herein, the term“and/or” includes any and all combinations of one or more of theassociated listed items.

Although the terms “first,” “second,” etc. may be used herein todescribe various types of elements, these elements should not be limitedby these terms. These terms are used to distinguish one element fromanother element. Thus, a first element discussed below could be termed asecond element without departing from the teachings of the disclosure.

Spatially relative terms, such as “beneath,” “below,” “under,” “lower,”“above,” “upper,” “over,” “higher,” “side” (e.g., as in “sidewall”), andthe like, may be used herein for descriptive purposes, and, thereby, todescribe one elements relationship to another element(s) as illustratedin the drawings. Spatially relative terms are intended to encompassdifferent orientations of an apparatus in use, operation, and/ormanufacture in addition to the orientation depicted in the drawings. Forexample, if the apparatus in the drawings is turned over, elementsdescribed as “below” or “beneath” other elements or features would thenbe oriented “above” the other elements or features. Thus, the exemplaryterm “below” can encompass both an orientation of above and below.Furthermore, the apparatus may be otherwise oriented (e.g., rotated 90degrees or at other orientations), and, as such, the spatially relativedescriptors used herein interpreted accordingly.

The terminology used herein is for the purpose of describing particularembodiments and is not intended to be limiting. As used herein, thesingular forms, “a,” “an,” and “the” are intended to include the pluralforms as well, unless the context clearly indicates otherwise. Moreover,the terms “comprises,” “comprising,” “includes,” and/or “including,”when used in this specification, specify the presence of statedfeatures, integers, steps, operations, elements, components, and/orgroups thereof, but do not preclude the presence or addition of one ormore other features, integers, steps, operations, elements, components,and/or groups thereof. It is also noted that, as used herein, the terms“substantially,” “about,” and other similar terms, are used as terms ofapproximation and not as terms of degree, and, as such, are utilized toaccount for inherent deviations in measured, calculated, and/or providedvalues that would be recognized by one of ordinary skill in the art.

Various exemplary embodiments are described herein with reference tosectional and/or exploded illustrations that are schematic illustrationsof idealized exemplary embodiments and/or intermediate structures. Assuch, variations from the shapes of the illustrations as a result, forexample, of manufacturing techniques and/or tolerances, are to beexpected. Thus, exemplary embodiments disclosed herein should notnecessarily be construed as limited to the particular illustrated shapesof regions, but are to include deviations in shapes that result from,for instance, manufacturing. In this manner, regions illustrated in thedrawings may be schematic in nature and the shapes of these regions maynot reflect actual shapes of regions of a device and, as such, are notnecessarily intended to be limiting.

Unless otherwise defined, all terms (including technical and scientificterms) used herein have the same meaning as commonly understood by oneof ordinary skill in the art to which this disclosure is a part. Terms,such as those defined in commonly used dictionaries, should beinterpreted as having a meaning that is consistent with their meaning inthe context of the relevant art and should not be interpreted in anidealized or overly formal sense, unless expressly so defined herein.

A light emitting device for a display according to an exemplaryembodiment includes: a first LED stack; a second LED stack disposedunder the first LED stack; a third LED stack disposed under the secondLED stack; a first transparent electrode interposed between the firstLED stack and the second LED stack, and being in ohmic contact with alower surface of the first LED stack; a second transparent electrodeinterposed between the first LED stack and the second LED stack, andbeing in ohmic contact with an upper surface of the second LED stack; athird transparent electrode interposed between the second LED stack andthe third LED stack, and being in ohmic contact with an upper surface ofthe third LED stack; an n-electrode pad disposed on a first conductivitytype semiconductor layer of the third LED stack; a lower p-electrode paddisposed on the third transparent electrode; and bump pads disposed onthe first LED stack, in which each of the first to third LED stacksincludes a first conductivity type semiconductor layer, an active layerand a second conductivity type semiconductor layer, the bump padsinclude first to third bump pads and common bump pads, in which thecommon bump pad is commonly electrically connected to the first to thirdLED stacks, the first to third bump pads are electrically connected tothe first to third LED stacks, respectively, and an upper surface of then-electrode pad is located at substantially the same elevation as thatof the lower p-electrode pad.

Hereinafter, the second LED stack is described as being disposed underthe first LED stack, and the third LED stack is described as beingdisposed under the second LED stack, however, in some exemplaryembodiments, the light emitting device may be flip-bonded. In this case,upper and lower positions of these first to third LED stacks may bereversed.

When the first to third LED stacks are stacked one above another, thelight emitting device may have an increased luminous area of eachsub-pixel without increasing a pixel area.

Furthermore, the upper surface of the n-electrode pad is set to belocated at substantially the same elevation as that of the lowerp-electrode pad, and thus, damage to any one of these pads may beprevented.

The first LED stack may emit light having a longer wavelength than thatemitted from the second LED stack, and the second LED stack may emitlight having a longer wavelength than that emitted from the third LEDstack. For example, the first, second, and third LED stacks may emit redlight, green light, and blue light, respectively. In another exemplaryembodiment, the first LED stack may emit light having a longerwavelength than that emitted from the third LED stack, and the secondLED stack may emit light having a shorter wavelength than that emittedfrom the third LED stack. For example, the first, second and third LEDstacks may emit red light, blue light, and green light, respectively.

The first to third LED stacks may be independently driven, lightgenerated from the first LED stack may be emitted to the outside throughthe second LED stack and the third LED stack, and light generated fromthe second LED stack may be emitted to the outside through the third LEDstack.

Any one of the first to third transparent electrodes may be formed of amaterial different from the remaining transparent electrodes. Forexample, the first transparent electrode may be formed ofindium-tin-oxide (ITO), and the second and third transparent electrodesmay be formed of ZnO.

Each of the first to third transparent electrodes may contact the secondconductivity type semiconductor layer, and the second and thirdtransparent electrodes may be recessed to have a smaller area than thatof the second conductivity type semiconductor layer of the second LEDstack and that of the second conductivity type semiconductor layer ofthe third LED stack, respectively.

In this manner, as the second and third transparent electrodes arerecessed, they may be prevented from being damaged by etching gas duringthe manufacturing process.

Further, the common bump pad may be commonly electrically connected tofirst conductivity type semiconductor layers of the first to third LEDstacks, in which the first to third bump pads may be electricallyconnected to second conductivity type semiconductor layers of first tothird LED stacks, respectively. However, the inventive concepts are notlimited thereto, the common bump pad may be commonly electricallyconnected to the second conductivity type semiconductor layers of thefirst to third LED stacks, and the first to third bump pads may beelectrically connected to the first conductivity type semiconductorlayers of the third LED stacks, respectively.

The light emitting device may further include an insulation layercovering side surfaces of the first to third LED stacks, in which theside surfaces of the first to third LED stacks and a side surface of thefirst transparent electrode may be in contact with the insulation layer,and side surfaces of the second and third transparent electrodes may bespaced apart from the insulation layer.

Side surfaces of the light emitting device may be inclined at a range ofabout 75 degrees to about 90 degrees with respect to the upper surfaceof the third LED stack. The inclination angle of the side surfaces ofthe light emitting device is set to about 75 degrees or more, and thus,a luminous area of the first LED stack may be secured.

The light emitting device may further include a first bonding layerinterposed between the second LED stack and the third LED stack; and asecond bonding layer interposed between the first LED stack and thesecond LED stack.

The light emitting device may further include lower through holespassing through the second LED stack and the first bonding layer toexpose the n-electrode pad and the lower p-electrode pad, respectively;a lower common connector connected to the n-electrode pad; and a lowerp-connector connected to the lower p-electrode pad, in which the lowercommon connector may be electrically connected to the first conductivitytype semiconductor layer of the LED stack, and connected to then-electrode pad exposed through the lower through hole, and the lowerp-connector may be electrically connected to the lower p-electrode padexposed through the lower through hole.

The light emitting device may further include an upper p-electrode padwhich is disposed on the second transparent electrode and electricallyconnected to the second conductivity type semiconductor layer of thesecond LED stack.

The light emitting device may further include a through hole passingthrough the first LED stack to expose the first transparent electrode;through holes passing through the first LED stack, the first transparentelectrode and the second bonding layer to expose the upper p-electrodepad, the lower p-connector, and the lower common connector,respectively; and first to third upper connectors and an upper commonconnector disposed on the first LED stack, and electrically connected tothe first transparent electrode, the upper p-electrode pad, the lowerp-connector, and the lower common connector through through holespassing through the first LED stack, in which the bump pads may bedisposed on the first to third upper connectors and the upper commonconnector, respectively.

The bump pads may be located on flat portions of the first to thirdupper connectors and the upper common connector, respectively.

The light emitting device may further include an upper insulation layercovering the first to third upper connectors and the upper commonconnector, in which the upper insulation layer may have openingsexposing the first to third upper connectors and the upper commonconnector, and each of the bump pads may be disposed in the openings.

The light emitting device may further include an intermediate insulationlayer disposed between the first LED stack and the upper connectors, inwhich the intermediate insulation layer may cover a side surface of thelight emitting device and a sidewall of the through hole passing throughthe first LED stack, and may include openings exposing the firsttransparent electrode, the upper p-electrode pad, the lower p-connector,and the lower common connector.

The first to third LED stacks may be stacks separated from a growthsubstrate. As such, the light emitting device does not have the growthsubstrate.

A light emitting device for a display according to another exemplaryembodiment includes: a first LED stack; a second LED stack disposedunder the first LED stack; a third LED stack disposed under the secondLED stack; a first transparent electrode interposed between the firstLED stack and the second LED stack, and being in ohmic contact with alower surface of the first LED stack; a second transparent electrodeinterposed between the first LED stack and the second LED stack, andbeing in ohmic contact with an upper surface of the second LED stack; athird transparent electrode interposed between the second LED stack andthe third LED stack, and being in ohmic contact with an upper surface ofthe third LED stack; bump pads disposed on the first LED stack, in whicheach of the first to third LED stacks may include a first conductivitytype semiconductor layer, an active layer, and a second conductivitytype semiconductor layer, and at least one of the first to thirdtransparent electrodes may be recessed from an edge of the secondconductivity type semiconductor layer of the first to third LED stacks.

The light emitting device may further include an n-electrode paddisposed on the first conductivity type semiconductor layer of the thirdLED stack; a lower p-electrode pad disposed on the third transparentelectrode, in which an upper surface of the n-electrode pad may belocated at substantially the same elevation as that of the lowerp-electrode pad.

A display apparatus according to an exemplary embodiment includes: acircuit board; and a plurality of light emitting devices arranged on thecircuit board, in which each of the light emitting devices may be anyone of the light emitting device set forth above, and the bump pads areelectrically connected to the circuit board.

Hereinafter, exemplary embodiments of the inventive concepts will bedescribed in detail with reference to the accompanying drawings.

FIG. 1 shows schematic perspective views illustrating displayapparatuses according to exemplary embodiments.

The display apparatus according to exemplary embodiments may be used ina VR display apparatus, such as a smart watch 1000 a or a VR headset1000 b, or an AR display apparatus, such as augmented reality glasses1000 c. However, the inventive concepts are not limited thereto. Thedisplay apparatus may include a display panel for implementing an image.

FIG. 2 is a schematic plan view illustrating the display panel accordingto an exemplary embodiment.

Referring to FIG. 2, the display panel includes a circuit board 101 andlight emitting devices 100.

The circuit board 101 may include a circuit for passive matrix drivingor active matrix driving. In an exemplary embodiment, the circuit board101 may include interconnection lines and resistors. In anotherexemplary embodiment, the circuit board 101 may include interconnectionlines, transistors, and capacitors. The circuit board 101 may also havepads disposed on an upper surface thereof to allow electrical connectionto the circuit therein.

A plurality of light emitting devices 100 are arranged on the circuitboard 101. Each of the light emitting devices 100 may form one pixel.The light emitting device 100 includes bump pads 73, and the bump pads73 are electrically connected to the circuit board 101. For example, thebump pads 73 may be bonded to pads exposed on the circuit board 101.

An interval between the light emitting devices 100 may be greater thanat least a width of the light emitting device 100.

A configuration of the light emitting device 100 according to anexemplary embodiment will be described with reference to FIG. 3A, FIG.3B, FIG. 3C, and FIG. 3D. FIG. 3A is a schematic plan view illustratingthe light emitting device 100 according to an exemplary embodiment. FIG.3B, FIGS. 3C, and 3D are schematic cross-sectional views taken along thelines A-A′, B-B′, and C-C′ of FIG. 3A, respectively. Hereinafter,although the bump pads 73 r, 73 b, 73 g, and 73 c are exemplarilyillustrated and described as being disposed at an upper side in FIG. 3Ato FIG. 3D, the inventive concepts are not limited thereto. For example,in some exemplary embodiments, the light emitting device 100 may beflip-bonded on the circuit board 101 shown in FIG. 2, and in this case,the bump pads 73 r, 73 b, 73 g, and 73 c may be disposed at a lowerside.

Referring to FIG. 3A, FIG. 3B, FIG. 3C and FIG. 3D, the light emittingdevice 100 may include a first LED stack 23, a second LED stack 33, athird LED stack 43, a first transparent electrode 25, a secondtransparent electrode 35, a third transparent electrode 45, ann-electrode pad 47 a, a lower p-electrode pad 47 b, an upper p-electrodepad 53 g, a lower p-connector 53 b, a lower common connector 53 c, anupper common connector 63 c, a first upper connector 63 r, a secondupper connector 63 g, a third upper connector 63 b, a first bondinglayer 49, a second bonding layer 59, a lower insulation layer 51, anintermediate insulation layer 61, an upper insulation layer 71, and bumppads 73 a, 73 b, 73 c, and 73 d. The light emitting device 100 mayfurther include through holes 23 h 1, 23 h 2, 23 h 3, and 23 h 4 passingthrough the first LED stack 23, and through holes 33 h 1 and 33 h 2passing through the second LED stack 33.

As shown in FIG. 3B, the first, second, and third LED stacks 23, 33, and43 according to an exemplary embodiment are stacked in the verticaldirection. The first, second, and third LED stacks 23, 33, and 43 may begrown on different growth substrates from each other, and according tothe illustrated exemplary embodiment, each of the growth substrates maybe removed from the final light emitting device 100. As such, the lightemitting device 100 does not include the growth substrates of the first,second, and third LED stacks 23, 33, and 43. However, the inventiveconcepts are not limited thereto, and in some exemplary embodiments, atleast one of the growth substrates may be included in the light emittingdevice 100.

Each of the first LED stack 23, the second LED stack 33 and the thirdLED stack 43 includes a first conductivity type semiconductor layer 23a, 33 a, or 43 a, a second conductivity type semiconductor layer 23 b,33 b, or 43 b, and an active layer interposed therebetween. The activelayer may have a multiple quantum well structure, for example.

The second LED stack 33 is disposed under the first LED stack 23, andthe third LED stack 43 is disposed under the second LED stack 33. Lightgenerated in the first to third LED stacks 23, 33, and 43 may be emittedto the outside through the third LED stack 43.

In an exemplary embodiment, the first LED stack 23 may emit light havinga longer wavelength than those emitted from the second and third LEDstacks 33 and 43, and the second LED stack 33 may emit light having alonger wavelength than that emitted from the third LED stack 43. Forexample, the first LED stack 23 may be an inorganic light emitting diodeemitting red light, the second LED stack 33 may be an inorganic lightemitting diode emitting green light, and the third LED stack 43 may bean inorganic light emitting diode to emitting blue light. For example,the first LED stack 23 may include an AlGaInP-based well layer, thesecond LED stack 33 may include an AlGaInP or AlGaInN-based well layer,and the third LED stack 43 may include an AlGaInN-based well layer.

Since the first LED stack 23 emits light having a longer wavelength thanthose emitted from the second and third LED stacks 33 and 43, lightgenerated from the first LED stack 23 may be emitted to the outsideafter passing through the second and third LED stacks 33 and 43. Inaddition, since the second LED stack 33 emits light having a longerwavelength than that of emitted from the third LED stack 43, lightgenerated from the second LED stack 33 may be emitted to the outsideafter passing through the third LED stack 43.

In another exemplary embodiment, the first LED stack 23 may emit lighthaving a longer wavelength than those emitted from the second and thirdLED stacks 33 and 43, and the second LED stack 33 may emit light havinga shorter wavelength than that emitted from the third LED stack 43. Forexample, the first LED stack 23 may be an inorganic light emitting diodeemitting red light, the second LED stack 33 may be an inorganic lightemitting diode emitting blue light, and the third LED stack 43 may be aninorganic light emitting diode emitting green light. For example, thefirst LED stack 23 may include an AlGaInP-based well layer, the secondLED stack 33 may include an AlGaInN-based well layer, and the third LEDstack 43 may include an AlGaInP-based or AlGaInN-based well layer.

A portion of light generated in the second LED 33 stack may be absorbedin the third LED stack 43, and thus, luminous intensity of light emittedfrom the second LED stack 33 may be relatively lower than that of lightemitted from the first or third LED stacks 23 or 43. Accordingly, aratio of luminance intensity of light emitted from the first to thirdLED stacks 23, 33, and 43 may be controlled.

According to the illustrated exemplary embodiment, the firstconductivity type semiconductor layer 23 a, 33 a or 43 a of each of theLED stacks 23, 33, and 43 may be an n-type semiconductor layer, and thesecond conductivity type semiconductor layer 23 b, 33 b or 43 b thereofmay be a p-type semiconductor layer. In addition, according to theillustrated exemplary embodiment, an upper surface of the first LEDstack 23 may be an n-type semiconductor layer 23 a, an upper surface ofthe second LED stack 33 may be a p-type semiconductor layer 33 b, and anupper surface of the third LED stack 43 may be a p-type semiconductorlayer 43 b. More particular, the first LED stack 23 has a stackedsequence of semiconductor layers different from those of the second andthird LED stacks 33 and 43. The semiconductor layers of the second LEDstack 33 are stacked in the same order as the semiconductor layers ofthe third LED stack 43, and thus, process stability may be enhanced,which will be described in more detail later with reference to amanufacturing method.

The second LED stack 33 includes a mesa etching region, in which aportion of the second conductivity type semiconductor layer 33 b isremoved to expose an upper surface of the first conductivity typesemiconductor layer 33 a. The third LED stack 43 also includes a mesaetching region, in which a portion of the second conductivity typesemiconductor layer 43 b is removed to expose an upper surface of thefirst conductivity type semiconductor layer 43 a. The first LED stack23, however, may not include a mesa etching region. The through holes 33h 1 and 33 h 2 may be formed in the mesa etching regions, and thus,sidewalls of the through holes 33 h 1 and 33 h 2 may have a steppedstructure. In this case, since the first LED stack 23 does not includethe mesa etching region, the through holes 23 h 1, 23 h 2, 23 h 3, and23 h 4 may have uniformly inclined sidewalls without having steppedsidewalls.

The third LED stack 43 according to an exemplary embodiment may have aflat lower surface, without being limited thereto. For example, thethird LED stack 43 may include irregularities on a surface of the firstconductivity type semiconductor layer 43 a, and light extractionefficiency may be improved by the irregularities. The irregularities onthe surface of the first conductivity type semiconductor layer 43 a maybe formed by separating a patterned sapphire substrate or by texturingthe surface after separating the growth substrate, for example. In someexemplary embodiments, the first conductivity type semiconductor layer33 a of the second LED stack 33 may also have a textured surface.

The first LED stack 23, the second LED stack 33 and the third LED stack43 according to the illustrated exemplary embodiment may be stacked tooverlap one another, and may also have substantially the same luminousarea. However, the luminous area of the first LED stack 23 may besmaller than that of the second LED stack 33, and the luminous area ofthe second LED stack 33 may be smaller than that of the third LED stack43, by the through holes 23 h 1, 23 h 2, 23 h 3, and 23 h 4 and thethrough holes 33 h 1 and 33 h 2. In addition, a side surface of thelight emitting device 100 may be inclined, such that a width of thelight emitting device 100 may be gradually increasing from the first LEDstack 23 to the third LED stack 43. As such, the luminous area of thethird LED stack 43 may be larger than that of the first LED stack 23. Aninclination angle of the side surface of the light emitting device 100with respect to the upper surface of the third LED stack 43 may be about75 degrees to about 90 degrees. When the inclination angle is less than75 degrees, the luminous area of the first LED stack 23 may become toosmall, and thus, it may be difficult to reduce a size of the lightemitting device 100.

The first transparent electrode 25 is disposed between the first LEDstack 23 and the second LED stack 33. The first transparent electrode 25is in ohmic contact with the second conductivity type semiconductorlayer 23 b of the first LED stack 23, and transmits light generated bythe first LED stack 23. The first transparent electrode 25 may be formedusing a transparent oxide layer or a metal layer, such as indium tinoxide (ITO). The first transparent electrode 25 may cover an entiresurface of the second conductivity type semiconductor layer 23 b of thefirst LED stack 23, and a side surface thereof may be disposed inparallel with a side surface of the first LED stack 23. More particular,the side surface of the first transparent electrode 25 may not becovered with the second bonding layer 59. Furthermore, the through holes23 h 2, 23 h 3, and 23 h 4 may pass through the first transparentelectrode 25, and thus, the first transparent electrode 25 may beexposed by the sidewalls of the through holes 23 h 2, 23 h 3, and 23 h4. Meanwhile, the through hole 23 h 1 exposes an upper surface of thefirst transparent electrode 25. However, the inventive concepts are notlimited thereto, and in some exemplary embodiments, the firsttransparent electrode 25 may be partially removed along an edge of thefirst LED stack 23, and thus, at least a portion of the side surface ofthe first transparent electrode 25 may be covered with the secondbonding layer 59. In addition, when the first transparent electrode 25is previously patterned and removed in a region where the through holes23 h 2, 23 h 3, and 23 h 4 are formed according to other exemplaryembodiments, the first transparent electrode 25 may not be exposed bythe sidewalls of the through holes 23 h 2, 23 h 3, and 23 h 4.

A second transparent electrode 35 is in ohmic contact with the secondconductivity type semiconductor layer 33 b of the second LED stack 33.As shown in the drawings, the second transparent electrode 35 contactsthe upper surface of the second LED stack 33 between the first LED stack23 and the second LED stack 33. The second transparent electrode 35 maybe formed of a metal layer or a conductive oxide layer that istransparent to red light. For example, the conductive oxide layer mayinclude SnO₂, InO₂, ITO, ZnO, IZO, or the like. In particular, thesecond transparent electrode 35 may be formed of ZnO, which may beformed as a single crystal on the second LED stack 33. In this manner,the ZnO may have favorable electrical and optical characteristics ascompared with the metal layer or other conductive oxide layers. Inparticular, ZnO has a strong bonding force to the second LED stack 33,and remains undamaged even when the growth substrate is separated usinga laser lift-off process during manufacture.

The second transparent electrode 35 may be partially removed along anedge of the second LED stack 33, and, accordingly, an outer side surfaceof the second transparent electrode 35 is not exposed to the outside,but is covered with the lower insulation layer 51. In particular, theside surface of the second transparent electrode 35 is recessed inwardlythan that of the second LED stack 33, and a region where the secondtransparent electrode 35 is recessed is filled with the lower insulationlayer 51 and the second bonding layer 59. The second transparentelectrode 35 is also recessed near the mesa etching region of the secondLED stack 33, and the recessed region is filled with the lowerinsulation layer 51 and the second bonding layer 59.

The third transparent electrode 45 is in ohmic contact with the secondconductivity type semiconductor layer 43 b of the third LED stack 43.The third transparent electrode 45 may be disposed between the secondLED stack 33 and the third LED stack 43, and contacts the upper surfaceof the third LED stack 43. The third transparent electrode 45 may beformed of a metal layer or a conductive oxide layer that is transparentto red light and green light. For example, the conductive oxide layermay include SnO₂, InO₂, ITO, ZnO, IZO, or the like. In particular, thethird transparent electrode 45 may be formed of ZnO, which may be formedas a single crystal on the third LED stack 43. In this manner, the ZnOmay have favorable electrical and optical characteristics as comparedwith the metal layer or other conductive oxide layers. In particular,ZnO has a strong bonding force to the third LED stack 43, and remainsundamaged even when the growth substrate is separated using the laserlift-off process during manufacture.

The third transparent electrode 45 may be partially removed along anedge of the third LED stack 43, and, accordingly, an outer side surfaceof the third transparent electrode 45 is not exposed to the outside, butis covered with the first bonding layer 49. In particular, the sidesurface of the third transparent electrode 45 is recessed inwardly thanthat of the third LED stack 43, and a region where the third transparentelectrode 45 is recessed is filled with the first bonding layer 49. Thethird transparent electrode 45 is also recessed near the mesa etchingregion of the third LED stack 43, and the recessed region is filled withthe first bonding layer 49.

The second transparent electrode 35 and the third transparent electrode45 are recessed as described above, and thus, the side surfaces of thesecond transparent electrode 35 and the third transparent electrode 45may be prevented from being exposed to an etching gas, thereby improvingthe production yield of the light emitting device 100.

According to an exemplary embodiment, the second transparent electrode35 and the third transparent electrode 45 may be formed of the same kindof conductive oxide layer, for example, ZnO, and the first transparentelectrode 25 may be formed of a different kind of conductive oxide layerfrom the second and third transparent electrodes 35 and 45, such as ITO.However, the inventive concepts are not limited thereto, and each of thefirst to third transparent electrodes 25, 35, and 45 may be of the samekind, or at least one may be of a different kind.

The first to third transparent electrodes 25, 35, and 45 may be formedusing a technique, such as thermal deposition, sputtering, sol-gel,hydrothermal synthesis, or the like. In particular, a transparentelectrode formed through a chemically thin-film forming method, such ashydrothermal synthesis method, may generate a porous thin-film. In thiscase, voids in the porous thin-film may improve the light extractionefficiency of the LED stack, and may further relieve stress.

The voids may be controlled to be distributed at locations to enhancethe optical properties of the LED stack. According to an exemplaryembodiment, the voids may be distributed generally close to a side ofthe second conductivity type semiconductor layer 22 b, 33 b, and 43 b atone half point of the transparent electrode. The transparent electrodeformed through the hydrothermal synthesis method may have voids and alsohave crystallinity, and, in particular, may be formed of a singlecrystal.

According to another exemplary embodiment, the voids may be distributedrelatively uniformly over a wide area. The transparent electrodeincluding the voids has an improved light extraction efficiency comparedto a transparent electrode without the voids. The transparent electrodemay be, for example, a ZnO layer or a doped ZnO layer. The doped ZnOlayer may include at least one of, for example, silver (Ag), indium(In), tin (Sn), zinc (Zn), cadmium (Cd), gallium (Ga), aluminum (Al),magnesium (Mg), titanium (Ti), molybdenum (Mo), nickel (Ni), copper(Cu), gold (Au), platinum (Pt), rhodium (Rh), iridium (Ir), ruthenium(Ru), and palladium (Pd), as a dopant.

In an exemplary embodiment, the ZnO layer may also include a ZnO seedlayer and a ZnO bulk layer. The ZnO seed layer has a relativelycontinuous surface. In addition, the ZnO seed layer and the ZnO bulklayer form a single crystal structure. In an exemplary embodiment, theZnO seed layer and the ZnO bulk layer do not exhibit any interfacebetween the ZnO seed layer and the ZnO bulk layer. In an exemplaryembodiment, the ZnO seed layer has a thickness of several hundredangstroms. The ZnO seed layer may have, for example, a thickness of 200angstroms or less. The ZnO bulk layer may have a thickness of 1 μm orless. In an exemplary embodiment, the ZnO bulk layer has a thickness of8000 angstroms or less.

The n-electrode pad 47 a is in ohmic contact with the first conductivitytype semiconductor layer 43 a of the third LED stack 43. The n-electrodepad 47 a may be disposed on the first conductivity type semiconductorlayer 43 a exposed through the second conductivity type semiconductorlayer 43 b, that is, in the mesa etching region. The n-electrode pad 47a may be formed of, for example, Cr/Au/Ti. An upper surface of then-electrode pad 47 a may be placed higher than that of the secondconductivity type semiconductor layer 43 b, and further, higher thanthat of the third transparent electrode 45. For example, a thickness ofthe n-electrode pad 47 a may be about 2 μm or more. The n-electrode pad47 a may have a shape of a truncated cone, but is not limited thereto.The n-electrode pad 47 a may have various shapes, such as a squarepyramid, a cylindrical shape, or a cylindrical shape.

The lower p-electrode pad 47 b may include substantially the samematerial as the n-electrode pad 47 a. An upper surface of the lowerp-electrode pad 47 b is located at the substantially same elevation asthe n-electrode pad 47 a, and, accordingly, a thickness of the lowerp-electrode pad 47 b may be less than that of the n-electrode pad 47 a.More particularly, the thickness of the lower p-electrode pad 47 b maybe approximately equal to a thickness of a portion of the n-electrodepad 47 a protruding above the second transparent electrode 45. Forexample, the thickness of the lower p-electrode pad 47 b may be about1.2 μm or less. The upper surface of the lower p-electrode pad 47 b islocated at substantially the same elevation as that of the n-electrodepad 47 a, and thus, the lower p-electrode pad 47 b and the n-electrodepad 47 a may be simultaneously exposed when the through holes 33 h 1 and33 h 2 are formed. When the elevations of the n-electrode pad 47 a andthe lower p-electrode pad 47 b are different, any one of the electrodepads may be damaged in the etching process. As such, the elevations ofthe n-electrode pad 47 a and the lower p-electrode pad 47 b are set tobe approximately equal, and thus, it is possible to prevent any one ofthe electrode pads from being damaged during the etching process or thelike.

The first bonding layer 49 couples the second LED stack 33 to the thirdLED stack 43. The first bonding layer 49 may be disposed between thefirst conductivity type semiconductor layer 33 a and the thirdtransparent electrode 45. The first bonding layer 49 may partiallycontact the second conductivity type semiconductor layer 43 b, and maypartially contact the first conductivity type semiconductor layer 43 aexposed by the mesa etching region. In addition, the first bonding layer49 may cover the n-electrode pad 47 a and the lower p-electrode pad 47.

The first bonding layer 49 may be formed of a transparent organicmaterial layer, or may be formed of a transparent inorganic materiallayer. For example, the organic material layer may include SUB, polymethylmethacrylate (PMMA), polyimide, parylene, benzocyclobutene (BCB),or the like, and the inorganic material layer may include Al₂O₃, SiO₂,SiNx, or the like. In addition, the first bonding layer 49 may be formedof spin-on-glass (SOG).

The through hole 33 h 1 and the through hole 33 h 2 pass through thesecond LED stack 33 and the first bonding layer 49 to expose then-electrode pad 47 a and the lower p-electrode pad 47 b, respectively.As described above, the through holes 33 h 1 and 33 h 2 may be formed inthe mesa etching region, and thus, the through holes 33 h 1 and 33 h 2may have stepped sidewalls.

The lower insulation layer 51 is formed on the second LED stack 33, andcovers the second transparent electrode 35. The lower insulation layer51 also covers the sidewalls of the through holes 33 h 1 and 33 h 2. Thelower insulation layer 51 may have openings 51 a exposing then-electrode pad 47 a, the lower p-electrode pad 47 b, the firstconductivity type semiconductor layer 33 a, and the second transparentelectrode 35. The lower insulation layer 51 may be formed of a siliconoxide film or a silicon nitride film, and may be formed to have athickness of, for example, about 800 nm.

The lower common connector 53 c may be disposed on the lower insulationlayer 51, and connected to the first conductivity type semiconductorlayer 33 a and the n-electrode pad 47 a exposed through the openings 51a of the lower insulation layer 51. In particular, the lower commonconnector 53 c is connected to the first conductivity type semiconductorlayer 33 a in the mesa etching region of the second LED stack 33, and isconnected to the n-electrode pad 47 a through the through hole 33 h 1.

The lower p-connector 53 b may be disposed on the lower insulation layer51, and connected to the lower p-electrode pad 47 b exposed through theopening 51 a of the lower insulation layer 51. At least a portion of thelower p-connector 53 b is disposed on the lower insulation layer 51.

The upper p-electrode pad 53 g may be disposed on the second transparentelectrode 35 in the opening 51 a of the lower insulation layer 51. Asshown in FIG. 3A and FIG. 3C, the upper p-electrode pad 53 g may bedisposed in the opening 51 a with a narrower width than that of theopening 51 a. However, the inventive concepts are not limited thereto,and in some exemplary embodiments, the width of the upper p-electrodepad 53 g may be greater than that of the opening 51 a, and a portion ofthe upper p-electrode pad 53 g may be disposed on the lower insulationlayer 51.

The lower common connector 53 c, the lower p-connector 53 b, and theupper p-electrode pad 53 g may be formed together in the same processand may include substantially the same material. For example, the lowercommon connector 53 c, the lower p-connector 53 b, and the upperp-electrode pad 53 g may include Ni/Au/Ti, and may be formed to have athickness of about 2 μm.

The second bonding layer 59 couples the first LED stack 23 to the secondLED stack 33. As shown, the second bonding layer 59 may be disposedbetween the first transparent electrode 25 and the lower insulationlayer 51. The second bonding layer 59 may also cover the lower commonconnector 53 c, the lower p-connector 53 b, and the upper p-electrodepad 53 g. The second bonding layer 59 may also partially contact thesecond transparent electrode 35 exposed through the opening 51 a of thelower insulation layer 51. The second bonding layer 59 may includesubstantially the same material that may form the first bonding layer 49described above, and thus, repeated descriptions thereof will be omittedto avoid redundancy.

The through holes 23 h 1, 23 h 2, 23 h 3, and 23 h 4 pass through thefirst LED stack 23. The through hole 23 h 1 is formed to provide apassage for allowing electrical connection to the first transparentelectrode 25. In the illustrated exemplary embodiment, the through hole23 h 1 exposes the upper surface of the first transparent electrode 25,and does not pass through the first transparent electrode 25. However,the inventive concepts are not limited thereto, and in some exemplaryembodiments, the through hole 23 h 1 may pass through the firsttransparent electrode 25, as long as the through hole 23 h 1 providesthe passage for electrical connection to the first transparent electrode25.

The through holes 23 h 2, 23 h 3, and 23 h 4 may pass through the firstLED stack 23, and may also pass through the second bonding layer 59. Thethrough hole 23 h 2 exposes the upper p-electrode pad 53 g, the throughhole 23 h 3 exposes the lower p-connector 53 b, and the through hole 23h 4 exposes the lower common connector 53 c.

The through holes 23 h 1, 23 h 2, 23 h 3, and 23 h 4 may be formed byetching the first conductivity type semiconductor layer 23 a and thesecond conductivity type semiconductor layer 23 b in the same process,and thus, the sidewalls of the through holes 23 h 1, 23 h 2, 23 h 3, and23 h 4 may have inclined surfaces without having a stepped structure.

The intermediate insulation layer 61 covers the first LED stack 23, andcovers the sidewalls of the through holes 23 h 1, 23 h 2, 23 h 3, and 23h 4. The intermediate insulation layer 61 may also cover side surfacesof the first to third LED stacks 23, 33, and 43. The intermediateinsulation layer 61 may be patterned to have openings 61 a exposing abottom portion of each of the through holes 23 h 1, 23 h 2, 23 h 3, and23 h 4. The first transparent electrode 25, the upper p-electrode pad 53g, the lower p-connector 53 b, and the lower common connector 53 c maybe exposed in the through holes 23 h 1, 23 h 2, 23 h 3, and 23 h 4 bythe openings 61 a. Further, the intermediate insulation layer 61 mayhave an opening 61 b exposing the upper surface of the first LED stack23, that is, the first conductivity type semiconductor layer 23 a. Theintermediate insulation layer 61 may be formed of an aluminum oxidefilm, a silicon oxide film, or a silicon nitride film, and may be formedto have a thickness of, for example, about 800 nm.

The first upper connector 63 r, the second upper connector 63 g, thethird upper connector 63 b, and the upper common connector 63 c aredisposed on the intermediate insulation layer 61. Each of the upperconnectors 63 r, 63 g, 63 b, and 63 c is connected to the firsttransparent electrode 25, the upper p-electrode pad 53 g, and the lowerp-connector 53 b exposed through the openings 61 a of the intermediateinsulation layer 61, respectively. Furthermore, the upper commonconnector 63 c may be connected to the first conductivity typesemiconductor layer 23 a exposed to the opening 61 b.

The first upper connector 63 r, the second upper connector 63 g, thethird upper connector 63 b, and the upper common connector 63 c may beformed of substantially the same material, for example, AuGe/Ni/Au/Ti,in the same process. In this case, AuGe may be in ohmic contact with thefirst conductivity type semiconductor layer 23 a. AuGe may be formed tohave a thickness of about 100 nm, and Ni/Au/Ti may be formed to have athickness of about 2 um. In some exemplary embodiments, AuTe may replaceAuGe.

The upper insulation layer 71 covers the intermediate insulation layer61, and covers the first upper connector 63 r, the second upperconnector 63 g, the third upper connector 63 b, and the upper commonconnector 63 c. The upper insulation layer 71 may also cover theintermediate insulation layer 61 on the side surfaces of the first tothird LED stacks 23, 33, and 43. The upper insulation layer 71 may haveopenings 71 a exposing the first upper connector 63 r, the second upperconnector 63 g, the third upper connector 63 b, and the upper commonconnector 63 c. The openings 71 a of the upper insulation layer 71 maybe generally disposed on flat surfaces of the first upper connector 63r, the second upper connector 63 g, the third upper connector 63 b, andthe upper common connector 63 c. The upper insulation layer 71 may beformed of a silicon oxide film or a silicon nitride film, and may beformed thinner than the intermediate insulation layer 61, for example,about 400 nm thick.

Each of the bump pads 73 r, 73 g, 73 b, and 73 c may be disposed on thefirst upper connector 63 r, the second upper connector 63 g, and thethird upper connector 63 b, and the common connector 63 c in theopenings 71 a of the upper insulation layer 71 and electricallyconnected thereto.

The first bump pad 73 r may be electrically connected to the secondconductivity type semiconductor layer 23 b of the first LED stack 23through the first upper connector 63 r and the first transparentelectrode 25.

The second bump pad 73 g may be electrically connected to the secondconductivity type semiconductor layer 33 b of the second LED stack 33through the second upper connector 63 g, the upper p-electrode pad 53 g,and the second transparent electrode 35.

The third bump pad 73 b may be electrically connected to the secondconductivity type semiconductor layer 43 b of the third LED stack 43through the third upper connector 63 b, the lower p-connector 53 b, thelower p-electrode pad 47 b, and the third transparent electrode 45.

The common bump pad 73 c may be electrically connected to the firstconductivity type semiconductor layer 23 a of the first LED stack 23through the upper common connector 63 c, electrically connected to thefirst conductivity type semiconductor layer 33 a of the second LED stack33 through the lower common connector 53 c, and electrically connectedto the first conductivity type semiconductor layer 43 a of the third LEDstack 43 through the n-electrode pad 47 a.

As such, each of the first to third bump pads 73 r, 73 g, and 73 b maybe electrically connected to the second conductivity type semiconductorlayers 23 b, 33 b, and 43 b of the first to third LED stacks 23, 33, and43, and the common bump pad 73 c may be commonly electrically connectedto the first conductivity type semiconductor layers 23 a, 33 a, and 43 aof the first to third LED stacks 23, 33, and 43.

The bump pads 73 r, 73 g, 73 b, and 73 c may be disposed in the openings71 a of the upper insulation layer 71, and upper surfaces of the bumppads 73 r, 73 g, 73 b, and 73 c may be substantially flat. The bump pads73 r, 73 g, 73 b, and 73 c may be disposed on the flat surfaces of thefirst to third upper connectors 63 r, 63 g, and 63 b, and the uppercommon connector 63 c. The bump pads 73 r, 73 g, 73 b, and 73 c may beformed of Au/In. For example, Au may be formed to have a thickness ofabout 3 μm, and In may be formed to have a thickness of about 1 μm.According to an exemplary embodiment, the light emitting device 100 maybe bonded to the pads on the circuit board 101 using In. However, theinventive concepts are not limited thereto, and in some exemplaryembodiments, the light emitting device 100 may be bonded to the padsusing Pb or AuSn of the bump pads.

In the illustrated exemplary embodiment, the upper surfaces of the bumppads 73 r, 73 g, 73 b, and 73 c are described and illustrated as beingflat, but the inventive concepts are not limited thereto. For example,in some exemplary embodiments, the bump pads 73 r, 73 g, 73 b, and 73 cmay have irregular upper surfaces, and some of the bump pads may bedisposed on the upper insulation layer 71.

According to the illustrated exemplary embodiment, the first LED stack23 is electrically connected to the bump pads 73 r and 73 c, the secondLED stack 33 is electrically connected to the bump pads 73 g and 73 c,and the third LED stack 43 is electrically connected to the bump pads 73b and 73 c. Accordingly, cathodes of the first LED stack 23, the secondLED stack 33, and the third LED stack 43 are electrically connected tothe common bump pad 73 c, and anodes thereof are electrically connectedto the first to third bump pads 73 a, 73 b, and 73 c, respectively.Accordingly, the first to third LED stacks 23, 33, and 43 may be drivenindependently.

A structure of the light emitting device 100 will be further describedthrough a method of manufacturing the light emitting device 100described below. FIG. 4A, FIG. 4B, and FIG. 4C are schematiccross-sectional views illustrating the first to third LED stacks grownon growth substrates, respectively, according to an exemplaryembodiment.

First, referring to FIG. 4A, a first LED stack 23 including a firstconductivity type semiconductor layer 23 a and a second conductivitytype semiconductor layer 23 b is grown on a first substrate 21. Anactive layer may be interposed between the first conductivity typesemiconductor layer 23 a and the second conductivity type semiconductorlayer 23 b.

The first substrate 21 may be a substrate capable of growing the firstLED stack 23 thereon, such as a GaAs substrate. The first conductivitytype semiconductor layer 23 a and the second conductivity typesemiconductor layer 23 b may be formed of an AlGaInAs-based orAlGaInP-based semiconductor layer, and the active layer may include, forexample, an AlGaInP-based well layer. A composition ratio of AlGaInP maybe determined so that the first LED stack 23 emits red light, forexample.

A first transparent electrode 25 may be formed on the secondconductivity type semiconductor layer 23 b. As described above, thefirst transparent electrode 25 may be formed of a metal layer or aconductive oxide layer that transmits light generated by the first LEDstack 23, for example, red light. The first transparent electrode 25 maybe formed of, for example, indium-tin oxide (ITO).

Referring to FIG. 4B, a second LED stack 33 including a firstconductivity type semiconductor layer 33 a and a second conductivitytype semiconductor layer 33 b is grown on a second substrate 31. Anactive layer may be interposed between the first conductivity typesemiconductor layer 33 a and the second conductivity type semiconductorlayer 33 b.

The second substrate 31 may be a substrate capable of growing the secondLED stack 33 thereon, such as a sapphire substrate, a GaN substrate, ora GaAs substrate. The first conductivity type semiconductor layer 33 aand the second conductivity type semiconductor layer 33 b may be formedof an AlGaInAs-based or AlGaInP-based semiconductor layer, anAlGaInN-based semiconductor layer, and the active layer may include, forexample, an AlGaInP-based well layer or AlGaInN-based well layer. Acomposition ratio of AlGaInP or AlGaInN may be determined so that thesecond LED stack 33 emits green light, for example.

A second transparent electrode 35 may be formed on the secondconductivity type semiconductor layer 33 b. As described above, thesecond transparent electrode 35 may be formed of a metal layer or aconductive oxide layer that transmits light generated by the first LEDstack 23, for example, red light. In particular, the second transparentelectrode 35 may be formed of ZnO.

Referring to FIG. 4C, a third LED stack 43 including a firstconductivity type semiconductor layer 43 a and a second conductivitytype semiconductor layer 43 b is grown on a third substrate 41. Anactive layer may be interposed between the first conductivity typesemiconductor layer 43 a and the second conductivity type semiconductorlayer 43 b.

The third substrate 41 may be a substrate capable of growing the thirdLED stack 43 thereon, such as a sapphire substrate, a SiC substrate, ora GaN substrate. In an exemplary embodiment, the third substrate 41 maybe a flat sapphire substrate, but may also be a patterned sapphiresubstrate. The first conductivity type semiconductor layer 43 a and thesecond conductivity type semiconductor layer 43 b may be formed of anAlGaInN-based semiconductor layer, and the active layer may include, forexample, an AlGaInN-based well layer. A composition ratio of AlGaInN maybe determined so that the third LED stack 43 emits blue light, forexample.

A third transparent electrode 45 may be formed on the secondconductivity type semiconductor layer 43 b. As described above, thethird transparent electrode 45 may be formed of a metal layer or aconductive oxide layer that transmits light generated in the first andsecond LED stacks 23 and 33, for example, red light and green light. Inparticular, the third transparent electrode 45 may be formed of ZnO.

The first to third LED stacks 23, 33, and 43 are grown on the differentgrowth substrates 21, 31, and 41, respectively, and, accordingly, theorder of the manufacturing process is not particularly limited.

Hereinafter, a method of manufacturing the light emitting device 100using first to third LED stacks 23, 33, and 43 grown on growthsubstrates 21, 31, and 41 will be described. Hereinafter, although aregion of a single light emitting device 100 will be mainly illustratedand described, a plurality of light emitting devices 100 may bemanufactured in a batch in the same manufacturing process using the LEDstacks 23, 33, and 43 grown on the growth substrates 21, 31, and 41.

FIGS. 5A, 5B, 5C, 5D, 6A, 6B, 6C, 6D, 7A, 7B, 7C, 7D, 8A, 8B, 8C, 8D,9A, 9B, 9C, 9D, 10A, 10B, 10C, 10D, 11A, 11B, 11C, 11D, 12A, 12B, 12C,12D, 13A, 13B, 13C, and 13D are schematic plan views and cross-sectionalviews illustrating the method of manufacturing the light emitting device100 for a display according to an exemplary embodiment of the presentdisclosure. Hereinafter, the cross-sectional views are shown tocorrespond to those shown in FIGS. 3B, 3C, and 3D, respectively.

First, referring to FIG. 5A, FIG. 5B, FIG. 5C, and FIG. 5D, the thirdtransparent electrode 45 and the second conductivity type semiconductorlayer 43 b of the third LED stack 43 are patterned to expose the firstconductivity type semiconductor layer 43 a using photo and etchingtechniques. This process corresponds to, for example, a mesa etchingprocess. A photoresist pattern may be used as an etching mask. Forexample, after the etching mask is formed, the third transparentelectrode 45 may be etched first by a wet etching technique, and thenthe second conductivity type semiconductor layer 43 b may be etched by adry etching technique using the same etching mask. In this manner, thethird transparent electrode 45 may be recessed from a mesa etchingregion. FIG. 5A exemplarily shows an edge of the mesa and does not showan edge of the third transparent electrode 45 to simplify illustrating.However, since the third transparent electrode 45 is wet etched usingthe same etching mask, the edge of the third transparent electrode 45may also be recessed from the edge of the mesa toward an inner side ofthe mesa. Since the same etching mask is used, the number of photoprocesses may not be increased, thereby reducing the process costs.However, the inventive concepts are not limited thereto, and the etchingmask for etching the mesa etching process may be different from theetching mask for etching the third transparent electrode 45.

Subsequently, an n-electrode pad 47 a and a lower p-electrode pad 47 bare formed on the first conductivity type semiconductor layer 43 a andthe third transparent electrode 45, respectively. The n-electrode pad 47a and the lower p-electrode pad 47 b may be formed to have differentthicknesses. In particular, an upper surface of the n-electrode pad 47 aand that of the lower p-electrode pad 47 b may be located atsubstantially the same elevation.

Referring to FIG. 6A, FIG. 6B, FIG. 6C, and FIG. 6D, the second LEDstack 33 shown in FIG. 4B is bonded onto the third LED stack 43described with reference to FIG. 5A, FIG. 5B, FIG. 5C, and FIG. 5D. Thesecond LED stack 33 is bonded to a temporary substrate using a temporarybonding/debonding (TBDB) technique, and the second substrate 31 isremoved from the second LED stack 33. The second substrate 31 may beremoved using, for example, a laser lift off technique. After the secondsubstrate 31 is removed, a roughened surface may be formed on a surfaceof the first conductivity type semiconductor layer 33 a. Thereafter, thefirst conductivity type semiconductor layer 33 a of the second LED stack33 bonded to the temporary substrate may be disposed to face the thirdLED stack 43 and bonded to the third LED stack 43. The second LED stack33 and the third LED stack 43 are bonded to each other by a firstbonding layer 49. After bonding the second LED stack 33 to the third LEDstack 43, the temporary substrate may be removed using the laser liftoff technique. Accordingly, the second LED stack 33 may be disposed onthe third LED stack 43, in which the second transparent electrode 35 mayform an upper surface.

In general, when the second transparent electrode 35 is formed of ITO,ITO may be peeled from the second LED stack 33 when the second substrate31 is removed using the laser lift off technique. As such, when thesecond substrate 31 is to be removed using the laser lift-off technique,the second transparent electrode 35 may include ZnO, which has afavorable bonding force.

Subsequently, the second transparent electrode 35 and the secondconductivity type semiconductor layer 33 b are patterned to expose thefirst conductivity type semiconductor layer 33 a. The second transparentelectrode 35 and the second conductivity type semiconductor layer 33 bmay be patterned by using photo and etching techniques. This process maybe performed using the wet etching and the dry etching techniques insubstantially the same manner as the mesa etching process, during whichthe third transparent electrode 45 and the second conductivity typesemiconductor layer 43 b are etched as described above.

For example, after the etching mask is formed, the second transparentelectrode 35 may be etched first by the wet etching technique, and thenthe second conductivity type semiconductor layer 33 b may be etched bythe dry etching technique using the same etching mask. Accordingly, thesecond transparent electrode 35 may be recessed from the mesa etchingregion. FIG. 6A exemplarily shows an edge of the mesa, and does not showan edge of the second transparent electrode 35 to simplify illustration.However, since the second transparent electrode 35 is wet etched usingthe same etching mask, the edge of the second transparent electrode 35may also be recessed from the edge of the mesa toward an inner side ofthe mesa. In this manner, since the same etching mask is used, thenumber of photo processes may not be increased, thereby reducing theprocess costs. However, the inventive concepts are not limited thereto,and in some exemplary embodiments, the etching mask for etching the mesaetching process and the etching mask for etching the second transparentelectrode 35 may be different from each other.

As shown in FIG. 6A, a mesa etching region of the second LED stack 33may be partially overlapped with that of the third LED stack 43. Forexample, a portion of the mesa etching region of the second LED stack 33may be formed over the n-electrode pad 47 a. In addition, anotherportion of the mesa etching region thereof may be disposed over thelower p-electrode pad 47 b. In addition, a portion of the mesa etchingregion of the second LED stack 33 may be disposed on the mesa region ofthe third LED stack 43.

Referring to FIG. 7A, FIG. 7B, FIG. 7C, and FIG. 7D, through holes 33 h1 and 33 h 2 passing through the second LED stack 33 are formed. Thethrough holes 33 h 1 and 33 h 2 pass through the first bonding layer 49to expose the n-electrode pad 47 a and the lower p-electrode pad 47 b.The through holes 33 h 1 and 33 h 2 may be formed in the mesa etchingregion, and thus, a stepped structure may be formed on sidewalls of thethrough holes 33 h 1 and 33 h 2.

Since the upper surfaces of the lower p-electrode pad 47 b and then-electrode pad 47 a are located at substantially the same elevation,any one of the pads may be prevented from being exposed and damagedduring the formation of the through holes 33 h 1 and 33 h 2.

Referring to FIG. 8A, FIG. 8B, FIG. 8C, and FIG. 8D, a lower insulationlayer 51 is formed on the second LED stack 33. The lower insulationlayer 51 covers the second transparent electrode 35, and covers thesecond conductivity type semiconductor layer 33 b. In addition, thelower insulation layer 51 covers the sidewalls of the through holes 33 h1 and 33 h 2. The lower insulation layer 51 may have openings 51 aexposing the second transparent electrode 35, the first conductivitytype semiconductor layer 33 a, the n-electrode pad 47 a and the lowerp-electrode pad 47 b.

Subsequently, a lower common connector 53 c, a lower p-connector 53 b,and an upper p-electrode pad 53 g are formed on the lower insulationlayer 51. The lower common connector 53 c, the lower p-connector 53 b,and the upper p-electrode pad 53 g may be formed together with the samematerial.

An upper p-electrode pad 53 g may be disposed on the second transparentelectrode 35 exposed in the opening 51 a. The lower p-connector 53 b isconnected to the lower p-electrode pad 47 b exposed through the opening51 a, and is also partially disposed on the lower insulation layer 51.The lower common connector 53 c is connected to the first conductivitytype semiconductor layer 33 a and the n-electrode pad 47 a exposedthrough the openings 51 a, and a portion of the lower common connector53 c is disposed on the lower insulation layer 51.

Referring to FIG. 9A, FIG. 9B, FIG. 9C and FIG. 9D, the first LED stack23 of FIG. 4A is bonded to the second LED stack 33. The first LED stack23 and the second LED stack 33 may be bonded using a second bondinglayer 59, so that the first transparent electrode 25 faces the secondLED stack 33. Accordingly, the second bonding layer 59 is in contactwith the first transparent electrode 25, and also is in contact with thelower insulation layer 51, the lower p-connector 53 b, the upperp-electrode pad 53 g, and the lower common connector 53 c, and, further,in contact with the second transparent electrode 35 exposed in aperiphery of the lower p-connector 53 b. The first substrate 21 isremoved from the first LED stack 23. The first substrate 21 may beremoved using, for example, an etching technique.

Referring to FIG. 10A, FIG. 10B, FIG. 10C, and FIG. 10D, through holes23 h 1, 23 h 2, 23 h 3, and 23 h 4 passing through the first LED stack23 are formed. The through hole 23 h 1 exposes the first transparentelectrode 25, and the through holes 23 h 2, 23 h 3, and 23 h 4 passthrough the second bonding layer 59 to expose the upper p-electrode pad53 g, the lower p-connector 53 b, and the lower common connector 53 c,respectively. Since the through holes 23 h 1 and the through holes 23 h2, 23 h 3, and 23 h 4 have different depths, they may be formed bydifferent processes. Meanwhile, the through holes 23 h 2, 23 h 3, and 23h 4 may be formed together in the same process because the depthsthereof are substantially the same.

The through holes 23 h 1, 23 h 2, 23 h 3, and 23 h 4 may be formed topass through the first LED stack 23, and thus, sidewalls of the throughholes may be formed without steps, unlike those of the through holes 33h 1 and 33 h 2.

Referring to FIG. 11A, FIG. 11B, FIG. 11C, and FIG. 11D, an isolationtrench is formed to define a region of the light emitting device 100 byan isolation process. The isolation trench may expose the thirdsubstrate 41 along peripheries of the first to third LED stacks 23, 33,and 43. Between regions of the light emitting device, the isolationtrench may be formed by sequentially removing the first LED stack 23,the first transparent electrode 25, the second bonding layer 59, thelower insulation layer 51, the second LED stack 33, the first bondinglayer 49, and the third LED stack 43. The second transparent electrode35 and the third transparent electrode 45 are not exposed during theisolation process, and thus, the second transparent electrode 35 and thethird transparent electrode 45 may not be damaged by etching gas. Whenthe second and third transparent electrodes 35 and 45 are formed of ZnO,ZnO may be easily damaged by etching gas. However, according to theillustrated exemplary embodiment, the second transparent electrode 35and the third transparent electrode 45 may be prevented from beingexposed to an etching gas by forming the second and third transparentelectrodes 35 and 45 to be recessed inwardly.

In the illustrated exemplary embodiment, the first to third LED stacks23, 33, and 43 are described as being sequentially patterned through theisolation process, but the inventive concepts are not limited thereto.For example, in some exemplary embodiments, the third LED stack 43 maybe removed in advance in a region where the isolation trench will beformed before bonding the second LED stack 33, or the second LED stack33 may be removed in advance in the region in which the isolation trenchwill be formed before bonding the first LED stack 23. In this case, theregion where the third LED stack 43 is removed may be filled with thefirst bonding layer 49, and the region where the second LED stack 33 isremoved may be filled with the second bonding layer 59. Accordingly, thesecond and third LED stacks 33 and 43 may not be exposed in theisolation process.

Referring to FIG. 12A, FIG. 12B, FIG. 12C, and FIG. 12D, an intermediateinsulation layer 61 is formed on the first LED stack 23. Theintermediate insulation layer 61 may cover side surfaces of the first tothird LED stacks 23, 33, and 43, side surfaces of the first and secondbonding layers 49 and 59, a side surface of the transparent electrode25, and a side surface of the lower insulation layer 51 exposed throughthe isolation trench.

The intermediate insulation layer 61 may also cover sidewalls of thethrough holes 23 h 1, 23 h 2, 23 h 3, and 23 h 4. However, theintermediate insulation layer 61 is patterned to have openings 61 aexposing bottoms of the through holes 23 h 1, 23 h 2, 23 h 3, and 23 h4, and an opening 61 b exposing the first conductivity typesemiconductor layer 23 a of the first LED stack 23. The openings 61 aexpose the first transparent electrode 25, the upper p-electrode pad 53g, the lower p-connector 53 b, and the lower common connector 53 c inthe through holes 23 h 1, 23 h 2, 23 h 3, and 23 h 4.

First to third upper connectors 63 r, 63 g, and 63 b, and an uppercommon connector 63 c are formed on the intermediate insulation layer61. The first upper connector 63 r is connected to the first transparentelectrode 25, the second upper connector 63 g is connected to the upperp-electrode pad 53 g, and the third upper connector 63 b is connected tothe lower p-connector 53 b. The upper common connector 63 c may beconnected to the lower common connector 53 c.

Referring to FIG. 13A, FIG. 13B, FIG. 13C, and FIG. 13D, an upperinsulation layer 71 is formed to cover the intermediate insulation layer61 and the connectors 63 r, 63 g, 63 b, and 63 c. The upper insulationlayer 71 may also cover the intermediate insulation layer 61 on the sidesurfaces of the first to third LED stacks 23, 33, and 43. However, theupper insulation layer 71 may be patterned to have openings 71 aexposing the first to third upper connectors 63 r, 63 g, and 63 b, andthe upper common connector 63 c.

Subsequently, bump pads 73 r, 73 g, 73 b, and 73 c are formed in theopenings 71 a, respectively. The first bump pad 73 r is disposed on thefirst upper connector 63 r, the second bump pad 73 g is disposed on thesecond upper connector 63 g, and the third bump pad 73 b is disposed onthe third upper connector 63 b. The common bump pad 73 c is disposed onthe upper common connector 63 c.

Then, the light emitting device 100 is bonded onto a circuit board 101(see FIG. 14), and the third substrate 41 may be separated to from thelight emitting device 100. A schematic cross-sectional view of the lightemitting device 100 bonded to the circuit board 101 is exemplarily shownin FIG. 14.

Although FIG. 14 exemplarily illustrates a single light emitting device100 disposed on the circuit board 101, however, a plurality of lightemitting devices 100 may be mounted on the circuit board 101. Each ofthe light emitting devices 100 may form one pixel capable of emittingany one of blue light, green light, and red light, and a plurality ofpixels are arranged on the circuit board 101 to provide a display panel.

The plurality of light emitting devices 100 may be formed on thesubstrate 41, and the light emitting devices 100 may be transferred ontothe circuit board 101 in a group, not individually. FIG. 15A, FIG. 15B,and FIG. 15C are schematic cross-sectional views illustrating a methodof transferring the light emitting device to the circuit board accordingto an exemplary embodiment. Hereinafter, a method of transferring thelight emitting devices 100 formed on the substrate 41 to the circuitboard 101 in a group will be described.

Referring to FIG. 15A, as described above, when the process of FIG. 13A,FIG. 13B, of FIG. 13C, and FIG. 13D are completed, the plurality oflight emitting devices 100 are isolated from each other, and arearranged on the substrate 41 by the isolation trench.

Meanwhile, the circuit board 101 having pads on an upper surface thereofis provided. The pads are arranged on the circuit board 101 tocorrespond to locations where the pixels for a display are to bearranged. In general, an interval between the light emitting devices 100arranged on the substrate 41 may be more dense than that of the pixelson the circuit board 101.

Referring to FIG. 15B, bump pads of the light emitting devices 100 areselectively bonded to the pads on the circuit board 101. The bump padsand the pads may be bonded using In bonding, for example. In this case,the light emitting devices 100 located between pixel regions may bespaced apart from the circuit board 101, since these light emittingdevices 100 do not have pads of the circuit board 101 to be boned to.

Subsequently, a mask 201 is disposed on the substrate 41 and isirradiated with a laser. A light transmitting region of the mask 201 isdisposed to correspond to the light emitting devices 100 bonded to thecircuit board 101, and thus, the light emitting devices 100 bonded tothe pads of the circuit board 101 are selectively irradiated with thelaser. Thereafter, the light emitting devices 100 are transferred to thecircuit board 101 by separating the light emitting devices 100irradiated with the laser from the substrate 41. Accordingly, thedisplay panel in which the light emitting devices 100 are arranged onthe circuit board 101 is provided. The display panel may be mounted onvarious display apparatuses as described with reference to FIG. 1.

Although certain exemplary embodiments and implementations have beendescribed herein, other embodiments and modifications will be apparentfrom this description. Accordingly, the inventive concepts are notlimited to such embodiments, but rather to the broader scope of theappended claims and various obvious modifications and equivalentarrangements as would be apparent to a person of ordinary skill in theart.

What is claimed is:
 1. A light emitting device for a display,comprising: a first LED stack, a second LED stack disposed under thefirst LED stack, and a third LED stack disposed under the second LEDstack, each of the first, second, and third LED stacks including a firstconductivity type semiconductor layer, an active layer, and a secondconductivity type semiconductor layer; a first transparent electrodeinterposed between the first LED stack and the second LED stack, and inohmic contact with a lower surface of the first LED stack; a secondtransparent electrode interposed between the first LED stack and thesecond LED stack, and in ohmic contact with an upper surface of thesecond LED stack; a third transparent electrode interposed between thesecond LED stack and the third LED stack, and in ohmic contact with anupper surface of the third LED stack; a first electrode pad disposed onthe first conductivity type semiconductor layer of the third LED stack;a lower second electrode pad disposed on the third transparentelectrode; and is a first bump pad, a second bump pad, a third bump pad,and a common bump pad disposed on the first LED stack, the first,second, and third bump pads being electrically connected to the first,second, and third LED stacks, respectively, and the common bump padbeing commonly electrically connected to the first, second, and thirdLED stacks, wherein an upper surface of the first electrode pad islocated at substantially the same elevation as that of the lower secondelectrode pad.
 2. The light emitting device for a display of claim 1,wherein the first, second, and third LED stacks are configured to emitred light, green light, and blue light, respectively.
 3. The lightemitting device for a display of claim 1, wherein: the first, second,and third LED stacks are configured to be independently driven; lightgenerated from the first LED stack is configured to be emitted to theoutside by passing through the second LED stack and the third LED stack;and light generated from the second LED stack is configured to beemitted to the outside by passing through the third LED stack.
 4. Thelight emitting device for a display of claim 1, wherein any one of thefirst, second, and third transparent electrodes comprises a materialdifferent from the remaining transparent electrodes.
 5. The lightemitting device for a display of claim 4, wherein the first transparentelectrode includes ITO, and the second and third transparent electrodesinclude ZnO.
 6. The light emitting device for a display of claim 5,wherein: each of the first, second, and third transparent electrodescontacts the second conductivity type semiconductor layer of the first,second, and third LED stacks, respectively; and the second and thirdtransparent electrodes have a smaller area than those of the secondconductivity type semiconductor layers of the second and third LEDstacks, respectively.
 7. The light emitting device for a display ofclaim 6, wherein: the common bump pad is commonly electrically connectedto first conductivity type semiconductor layers of the first, second,and third LED stacks; and the first, second, and third bump pads areelectrically connected to second conductivity type semiconductor layersof first, second, and third LED stacks, respectively.
 8. The lightemitting device for a display of claim 6, further comprising aninsulation layer covering side surfaces of the first, second, and thirdLED stacks, wherein the side surfaces of the first, second, and thirdLED stacks and a side surface of the first transparent electrode are incontact with the insulation layer, and side surfaces of the second andthird transparent electrodes are spaced apart from the insulation layer.9. The light emitting device for a display of claim 1, wherein sidesurfaces of the light emitting device are inclined at a range of about75 degrees to about 90 degrees with respect to the upper surface of thethird LED stack.
 10. The light emitting device for a display of claim 1,further comprising: a first bonding layer interposed between the secondLED stack and the third LED stack; and a second bonding layer interposedbetween the first LED stack and the second LED stack.
 11. The lightemitting device for a display of claim 10, further comprising: lowerthrough holes passing through the second LED stack and the first bondinglayer to expose the first electrode pad and the lower second electrodepad, respectively; a lower common connector connected to the firstelectrode pad; and a lower second connector connected to the lowersecond electrode pad, wherein: the lower common connector iselectrically connected to the first conductivity type semiconductorlayer of the LED stack, and connected to the first electrode pad exposedthrough one of the lower through holes; and the lower second connectoris electrically connected to the lower second electrode pad exposedthrough another one of the lower through holes.
 12. The light emittingdevice for a display of claim 11, further comprising an upper secondelectrode pad disposed on the second transparent electrode, andelectrically connected to the second conductivity type semiconductorlayer of the second LED stack.
 13. The light emitting device for adisplay of claim 12, further comprising: a first upper through holepassing through the first LED stack to expose the first transparentelectrode; second upper through holes passing through the first LEDstack, the first transparent electrode, and the second bonding layer toexpose the upper second electrode pad, the lower second connector, andthe lower common connector, respectively; and first, second, and thirdupper connectors and an upper common connector disposed on the first LEDstack, and electrically connected to the first transparent electrode,the upper second electrode pad, the lower second connector, and thelower common connector through the upper through holes passing throughthe first LED stack, respectively, wherein the first, second, third, andcommon bump pads are disposed on the first, second, and third upperconnectors and the upper common connector, respectively.
 14. The lightemitting device for a display of claim 13, wherein the first, second,third, and common bump pads are disposed on flat portions of the first,second, and third upper connectors and the upper common connector,respectively.
 15. The light emitting device for a display of claim 14,further comprising an upper insulation layer covering the first, second,and third upper connectors and the upper common connector, wherein: theupper insulation layer has openings exposing the first, second, andthird upper connectors and the upper common connector; and each of thefirst, second, third, and common bump pads is disposed in the openings.16. The light emitting device for a display of claim 15, furthercomprising an intermediate insulation layer disposed between the firstLED stack and the first, second, third, common upper connectors, whereinthe intermediate insulation layer covers a side surface of the lightemitting device and a sidewall of the first upper through hole passingthrough the first LED stack, and includes openings exposing the firsttransparent electrode, the upper second electrode pad, the lower secondconnector, and the lower common connector.
 17. The light emitting devicefor a display of claim 1, wherein the first, second, and third LEDstacks are isolated from a growth substrate.
 18. A light emitting devicefor a display, comprising: a first LED stack, a second LED stackdisposed under the first LED stack, and a third LED stack disposed underthe second LED stack, each of the first, second, and third LED stacksincluding a first conductivity type semiconductor layer, an activelayer, and a second conductivity type semiconductor layer; a firsttransparent electrode interposed between the first LED stack and thesecond LED stack, and in ohmic contact with a lower surface of the firstLED stack; a second transparent electrode interposed between the firstLED stack and the second LED stack, and in ohmic contact with an uppersurface of the second LED stack; a third transparent electrodeinterposed between the second LED stack and the third LED stack, andbeing in ohmic contact with an upper surface of the third LED stack; andbump pads disposed on the first LED stack, wherein at least one of thefirst, second, and third transparent electrodes is recessed from an edgeof one of the second conductivity type semiconductor layers of thefirst, second, and third LED stacks.
 19. The light emitting device for adisplay of claim 18, further comprising: a first electrode pad disposedon the first conductivity type semiconductor layer of the third LEDstack; and a lower second electrode pad disposed on the thirdtransparent electrode, wherein an upper surface of the first electrodepad is located at substantially the same elevation as that of the lowersecond electrode pad.
 20. A display apparatus comprising: a circuitboard; and a plurality of light emitting devices of claim 1 arranged onthe circuit board, wherein the first bump pad, the second bump pad, thethird bump pad, and the common bump pad are bonded to the circuit board.21. A display apparatus comprising: a circuit board; and a plurality oflight emitting devices of claim 18 arranged on the circuit board,wherein the bump pads are bonded to the circuit board.